Advances in nano-imprint lithography have moved the technology out of the laboratory and onto the production floor for use in a wide variety of photonic applications. As manufacturers of high ...

Finally, the template is separated from the substrate and the pattern is etched. Fig. 6: Canon’s Jet and Flash Imprint Lithography (J-FIL) technology Source: Canon, Microsystems & ...

The researchers fabricated the nFRCS sensor using roll-to-plate nano-imprint lithography (NIL), which uses a stamping-like method to transfer the nanoscale patterns onto the MHM layer. Compared to ...

Nano-imprint lithography is now a commercial reality and Sematech is assessing it for use in the semiconductor industry. Although this technique has great resolution, its use for making integrated ...