In the semiconductor industry, ion implantation process has expanded to a wide range of applications with doses and energies spanning several orders of magnitude. Ion implantation is a very ...

The feature size of silicon-based transistors is approaching the theoretical limit, which puts forward higher requirements for the “atomic level manufacturing” of semiconductors. The basic idea of ...

Form device structure using only ion implantation process without epitaxy for the cost effective mass production of high-performance SiC power semiconductors by developing ion implantation process ...

Six critical steps are involved in the manufacturing of semiconductors. These steps include deposition, photoresist, lithography, etch, ionization and packaging. This article discusses several ...

China Electronics Technology Group (CETC) has announced the development of ion implanters for 28nm process fabrication, marking another breakthrough in China's homegrown semiconductor front-end ...