Microelectromechanical systems (MEMS) technology has allowed the ... coated glass plates bonded to an underlying array of piezoelectric actuators. Although expensive and challenging to fabricate ...

This simple STM setup utilises a piezoelectric actuator constructed by deliberately cutting a piezo speaker into four quadrants. With individual drive wires attached to the four quadrants.

Researchers from Tsinghua University, the Beijing Institute of Technology, the University of Wollongong (Australia), and the ...

Piezoelectric actuators convert electrical energy into precise mechanical motion. They are used in microelectromechanical systems (MEMS), precision positioning stages, and active vibration control ...

Piezoelectric microelectromechanical sensors and actuators are used in a wide variety of applications. Compared to traditional capacitive MEMS, piezoelectric MEMS deliver superior performance and ...