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MEMS accelerometer sensors have been developed in decade years at various techniques such as piezoelectric, piezo-resistive, and micro capacitive etc. But the optical technology will bring the new ...

This paper reports on the design and characterization of a high-g CMOS-MEMS capacitive accelerometer array with 92 mG bias stability and ± 50 kG designed input range with a validated 91 dB dynamic ...