MEMS accelerometer, the key component of the Inertial Navigation System (INS), has been widely applied in various electronic consumption fields such as mobile phones and unmanned vehicles. However, it ...

This paper reports on the design and optimization of a 2-axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...