TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...

This study reports a closed-loop system (CLS) for resonant micro-electromechanical systems (MEMS) sensors subject to blue-sideband excitation (BSE) for the first time. Compared with the conventional ...

MEMS oscillators exhibit singular terms, which complicates the enhancement of solution accuracy in the vicinity of singularities. Furthermore, the method’s outputs are found to be highly sensitive to ...

This paper reports on the design and characterization of a high-g CMOS-MEMS capacitive accelerometer array with 92 mG bias stability and ± 50 kG designed input range with a validated 91 dB dynamic ...