This paper reports a micro-oven-controlled silicon oscillator with electrostatic tuning for frequency trimming for the first time. The resonator is degenerately doped with phosphorous and micro-oven ...

This letter conducts a thorough comparison between two temperature compensation methods for resonant micro-electro-mechanical-system (MEMS) sensors, i.e., 1) a newly proposed in-situ temperature ...

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...